High Throughput Methods for Evaluating the Homogeneity of Nanomaterials for Nanoelectronics

Wei Zhao,Dongqi Li,Wenyun Wu,Jin Zhang,Bingyu Xia,Peng Liu,Yang Wei,Kaili Jiang
DOI: https://doi.org/10.1109/nmdc.2017.8350497
2017-01-01
Abstract:INVITED One-dimensional (1D) and two-dimensional (2D) materials have attracted great interest for their unique properties and potential applications in nanoelectronics. A key step in realizing industrial applications is to synthesize wafer-scale homogeneous samples. Recently, much progress has been made on preparing homogeneous 1D and 2D samples such as single-walled carbon nanotubes (SWCNTs) with identical chiral indices and graphene domains up to centimeter size. A new challenge, however, is how to efficiently evaluate the homogeneity of such large area samples. Here we show high throughput methods for evaluating the homogeneity of large area carbon nanotube arrays and graphenes, including SEM imaging of carbon nanotubes with the contrast coming from conductivity and bandgap, real-time true-color imaging of carbon nanotubes via enhanced Rayleigh scattering which facilitates high throughput chirality assignment of individual carbon nanotubes, and low energy transmission electron diffraction and imaging of large area graphene to evaluate the single crystalline orientations. The aforementioned approaches are not restricted to SWCNTs and graphenes. They can also be applied to a wide variety of other 1D and 2D nanomaterials.
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