Abstract:Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, $$ (0001) - [10\bar{1}0]{\text{ZnO}} $$ or $$ (11\bar{2}0) - [0001]{\text{ZnO}} $$ directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the $$ (11\bar{2}0) - [0001] $$ structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

Influences of reflectors for high quality factor in piezoelectric ALN/SOI lamb wave sensors

Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators

Influence of a Piezoelectric ZnO Intermediate Layer on Rayleigh Waves Propagating in Sc 43% AlN 57% /zno/diamond Hetero-Structures Subjected to Uniaxial Stress

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Transducer design for AlN Lamb wave resonators

Evaluation of residual stress of c oriented AlN/Si (111) and its impact on mushroom-shaped piezoelectric resonator

Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc 0.095 N-based S0 mode Lamb-wave resonators

Flexible Surface Acoustic Wave Device with Aln Film on Polymer Substrate

Thickness dependence of the mechanical properties of piezoelectric high-$Q_m$ nanomechanical resonators made from aluminium nitride

Nanomechanical Crystalline AlN Resonators with High Quality Factors for Quantum Optoelectromechanics

High-Performance SAW Resonators Based on Single-crystalline a-Plane AlN Thin Films on Sapphire Substrates

Aspect ratio optimization of piezoelectric extensional mode resonators for quality factor and phase noise performance enhancement

Performance Analysis of Pure-lateral-field-excitation Piezoelectric Sensors with Different Electrode Configuration

Lateral Field Excitation of Thickness Longitudinal Mode and Shear Mode with ZnO Based on Solidly Mounted Resonator

High- Q film bulk acoustic resonator with high quality AlN film based on transfer method

Investigation on the temperature coefficient of frequency performance of LiNbO3 on quartz and glass surface acoustic wave resonators

An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

High Quality Factors in Superlattice Ferroelectric Hf 0.5 Zr 0.5 O 2 Nanoelectromechanical Resonators

A Dual-Driving Piezoelectric DETF Resonator with High Quality Factor and Low Multimode Effect

In Situ Synchrotron XRD Characterization of Piezoelectric Al1-xScxN Thin Films for MEMS Applications