Tuning the electrical performance and bias stability of a semiconducting SWCNT thin film transistor with an atomic layer deposited AlZrOx composite

Jun Li,Chuan-Xin Huang,Jianhua Zhang
DOI: https://doi.org/10.1039/c7ra10448k
IF: 4.036
2017-01-01
RSC Advances
Abstract:Solution-processed semiconducting single-walled carbon nanotube (s-SWCNT) thin film transistors (TFTs) based on different atomic layer deposited AlZrOx insulators are fabricated and characterized. It is found that increasing the Al concentration in the AlZrOx insulator can reduce leakage current and decrease the surface roughness of the AlZrOx insulator. Compared with the device with a ZrO2 insulator, the electrical performance, including subthreshold swing, I-on/I-off and hysteresis, and negative bias stability of s-SWCNT TFTs with the AlZrOx insulator has been significantly improved. The s-SWCNT TFT based on AlZrOx with a ZrO2/Al2O3 cycle ratio of 1/2 reveals a superior electrical performance with an average mobility of 35.2 cm(2) V-1 s(-1), a high on/off ratio of 3.7 x 10(5), a low subthreshold swing of 0.09, a small hysteresis of 0.1 V, and a small threshold voltage shift of 1.62 V under a negative bias stress of -3 V for 1800 s. The improvement of electrical performance and stability for the s-SWCNT TFT with the AlZrOx insulator is attributed to the smooth surface and less AlZrOx/s-SWCNT interface traps. Our results suggest that using a AlZrOx film as a gate insulator can be a useful technique to achieve high performance and more reliable solution-processed s-SWCNT TFTs.
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