Abstract:Atomic force microscopy (AFM) is most widely applied in scientific research and industrial production. AFM is a scanning probe imaging and measuring device, useful for physical and chemical studies. Depends on its basic structure, microscopic surface pattern can be measured and captured by mechanically scanning. Its vertical and horizon resolution can reach to 0.01nm and 0.1nm. Commonly the measurement values of commercial AFM are directly from scanning piezoelectric tube, so that it not a traceable value. In order to solve the problem of commercial AFM's traceability, step height standard references are applied to calibrate the piezoelectric ceramic housing in scanning tube. All of the serial of step height standard references, covering the commercial AFM vertical scale, are calibrated by Metrology AFM developed by National Institute of Metrology (NIM), China. Three interferometers have been assembled in its XYZ axis, therefore the measurement value can directly trace to laser wavelength. Because of nonlinear characteristic of PZT, the method of segmental calibration is proposed. The measurement scale can be divided into several subsections corresponding to the calibrated values of the series of step height standards references. By this method the accuracy of measurements can be ensured in each segment measurement scale and the calibration level of the whole instrument can be promoted. In order to get a standard step shape by commercial AFM, substrate removal method is applied to deal with the bow shape problem.

Towards a traceable probe calibration method for white light interference based AFM

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Improved Zero-Order Fringe Positioning Algorithms in White Light Interference Based Atomic Force Microscopy

Traceable atomic force microscope based on monochromatic light interference

Application of calibrated and reusable probes on a home-made scanning probe microscope platform

High Accuracy Calibration Method for Multi-Line Structured Light Three-Dimensional Scanning Measurement System Based on Grating Diffraction.

Influence of Probe Dynamic Characteristics on the Scanning Speed for White Light Interference Based AFM

A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Fractionized Calibration of the Sample Stage Used in an AFM-probe Mechanical Testing System

Lateral force calibration for atomic force microscope cantilevers using a suspended nanowire

Position Measuring System in Metrological Atomic Force Microscope

Method For Traceable Resolution Calibration Of The Laser Feedback Displacement Sensor

Three-dimensional atomic force microscopy based on tailored cantilever probe with flared tip

A Vibration Compensation Method Based on White-light Wavelength Scanning Interferometry

Calibration of the Effective Spring Constant of Ultra-Short Cantilevers for A High-Speed Atomic Force Microscope

Dynamic Confocal Optical Probe Based on Time Difference Measurement

A Novel Atomic Force Microscope Operating in Liquid with Open Probe Unit and Optimized Laser Tracking System

A Novel Four-Port Symmetric Probe Calibration Method for On-Wafer S-Parameter Measurement

Segmental Calibration for Commercial AFM in Vertical Direction

A wide-range metrology AFM and its applications

Optimization Of The Tip Of Microwave Afm Probe