Investigation of a Large Power Water-Cooled Microwave Resonance Window for Application with the ECR Ion Source

Guo,Junwei Guo,Xinjian Niu,Yinghui Liu,Hui Wang,Yanyu Wei

DOI: https://doi.org/10.1063/1.4986073

IF: 2.2

2017-01-01

Physics of Plasmas

Abstract:A large power water-cooled microwave resonance window used for the electron cyclotron resonance (ECR) ion source is investigated in this paper. The microwave characteristic simulation, thermal analysis, and structure design are deeply and successively carried out before fabrication. After the machining and welding of the components, the window is cold and hot tested. The application results demonstrate that when the input power is 2000 W, the reflected power is only 5 W. The vacuum is below 10−10 Pa, and the high power microwave operation can last 30 h continuously and reliably, which indicates that the design and assembling can achieve the high efficiency of the microwave transmission. Finally, the performance of the ECR ion source is enhanced by the improvement of the injected microwave power to the ECR plasma.