Abstract:The influence of nitrogen plasma generated by electron cyclotron resonance (ECR) microwave discharge on deposition of carbon nitride films by means of ECR plasma assisted reactive pulsed laser deposition was investigated by a comparative study on the optical emission of the plume produced by pulsed laser ablation of a graphite target in ECR nitrogen plasma, in vacuum and in low-pressure nitrogen gas ambient. Spatial and temporal spectroscopic measurements show that in vacuum optical emission lines originating from carbon atoms and ions dominate the plume emission, while in low-pressure N2 ambient weak CN emissions appear. In nitrogen plasma, the plume emission exhibits itself very differently. It evolves from consisting of emissions almost from mono-atomic carbon atoms and ions to being dominated by emissions from CN molecules. The presence of the reactive nitrogen plasma greatly enhanced the CN emissions and eliminated the emission lines from carbon atoms and ions. The appearance of the CN emissions occurs after the emissions from carbon atoms and ions have decayed considerably, indicating that the dominant mechanism for the formation of CN molecules is gaseous phase reaction. Carbon nitride films with nitrogen content of about 40 at.% were obtained. Possible processes for CN molecule formation in gaseous phase and mechanisms responsible for efficient nitrogen incorporation and carbon nitride film deposition were suggested.

Raman Spectroscopy of Carbon Nano-Particles Synthesized by Laser Ablation of Graphite in Water

Synthesis of C3N4+ by the Combination of Laser Ablation of Graphite and N2 Molecular Beam

Probing Carbon Nanoparticles in Cnx Thin Films Using Raman Spectroscopy

Raman Spectra Of Nanocrystalline Carbon Nitride Synthesized On Cobalt-Covered Substrate By Nitrogen-Atom-Beam-Assisted Pulsed Laser Ablation

Single-Wall Carbon Nanotubes Synthesized by Laser Ablation in A Nitrogen Atmosphere

Nanosecond pulsed laser ablation of synthetic graphite in liquids for the synthesis of spherical graphene

Scalable Production of Carbon Encapsulated Ni Nanoparticles by Water Arc Discharge: Structural and Magnetic Properties

Laser raman studies on carbons

Synthesis of Carbon Nano-Tubes by Pulsed Laser Ablation at Normal Pressure in Metal Nano-Sol

Spectroscopic Study on Pulsed Laser Ablation of Graphite Target in Ecr Nitrogen Plasma for Carbon Nitride Film Deposition

Laser Ablated Carbon Nanodots for Light Emission

Large-scale Synthesis of Single-Walled Carbon Nanohorns by Submerged Arc

[The Raman Scatting of Carbon Nanotubes].

Studies of CN1 Films Deposited by Ion-Beam-Assisted Laser Ablation of Graphite

Studies of Cn<sub>1</sub> Films Deposited by Ion-Beam-Assisted Laser Ablation of Graphite

Large Optical Nonlinearity of the Activated Carbon Nanoparticles Prepared by Laser Ablation

Studies Of Cnx Films Deposited By Ion-Beam-Assisted Laser Ablation Of Graphite

Raman Investigation of Amorphous Carbon in Diamond Film Treated by Laser

Laser-induced glassy carbon nanofiber trees

Synthesis and Characterization of Carbon Nanostructures by Evaporating Pure Graphite and Carbon Black in Detonation-Gas Arc Discharge

Fluorescent Carbon Nanoparticle: Synthesis, Characterization and Bio-imaging Application