Surface Textured Silicon Single-Photon Avalanche Diode

Kai Zang,Xun Ding,Xiao Jiang,Yijie Huo,Matthew Morea,Xiaochi Chen,Ching-Ying Lu,Muyu Xue,Yusi Chen,Colleen Shang,Theodore I. Kamins,Qiang Zhang,Jian-Wei Pan,James S. Harris
DOI: https://doi.org/10.1364/cleo_si.2017.sm3k.2
2017-01-01
Abstract:We present a surface textured Si SPAD with improved detection efficiency and without sacrificing dark count rate or jitter distribution. Texturing reduces reflection, allows weak light trapping and is CMOS and lithography compatible.
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