Electrical and Optical 3D Modelling of Light-Trapping Single-Photon Avalanche Diode

Tianzhe Zheng,Kai Zang,Matthew Morea,Muyu Xue,Ching-Ying Lu,Xiao Jiang,Qiang Zhang,Theodore I. Kamins,James S. Harris
DOI: https://doi.org/10.1117/12.2287312
2018-01-01
Abstract:Single-photon avalanche diodes (SPADs) have been widely used to push the frontier of scientific research (e.g., quantum science and single-molecule fluorescence) and practical applications (e.g., Lidar). However, there is a typical compromise between photon detection efficiency and jitter distribution. The light-trapping SPAD has been proposed to break this trade-off by coupling the vertically incoming photons into a laterally propagating mode while maintaining a small jitter and a thin Si device layer. In this work, we provide a 3D-based optical and electrical model based on practical fabrication conditions and discuss about design parameters, which include surface texturing, photon injection position, device area, and other features.
What problem does this paper attempt to address?