Abstract:With the rapid development of the information era and super-precision fabrication technology, micro/nano technology has already become one of the most important modern scientific directions. To quantitatively characterize the defects, uniformity, quality and performances of micro/ nano devices, three-dimensional topography measurement plays a key role and has become increasingly 6important. In this paper, we proposed a microsphere-aided Mirau-based broadband light interferometry method to achieve super-resolution 3D topography reconstruction. We numerically and experimentally demonstrated that dielectric microspheres, which can introduce the phenomenon of photonic nanojet, could break the optical diffraction limit and achieve super-resolution microscopy under white light illumination. The subwavelength samples, which could not be detected by conventional microscopy, were clearly visualized by the proposed microsphere-aided microscopy. Furthermore, we applied the advanced Stoilov five-step phase shifting method to reconstruct the 3D topography. The experiment results demonstrated that our proposed microsphere-aided broadband light interferometry method could successfully reconstruct the 3D shape of nanoscale cylinders with the feature size of 228 nm and height of 150 nm with an error of 2%. As microsphere is a low-cost, easy-to-use, and super-resolution imaging method, it bears great potential to be widely applied in both scientific and industrial areas. We believe that our proposed super-resolution three-dimensional topography measurement using microsphere-aided broadband light interferometry will be of great interests in semiconductor, material, laser eavesdropping, extreme fabrication and biomedical applications.

New Method of Three-Dimensional Position Fast and Precision Measurement of Microspheres

Creating Attoliter Detection Volume by Microsphere Photonic Nanojet and Fluorescence Depletion

3D dual-virtual-pinhole assisted single particle tracking microscopy

Study on Measurement Method of Three-dimensional Position of Unlabeled Microspheres under Bright Background

Improving the Signal-to-Noise Ratio of Axial Displacement Measurements of Microspheres Based on Compound Digital Holography Microscopy Combined with the Reconstruction Centering Method

Axial Displacement Measurement with High Resolution of Particle Movement Based on Compound Digital Holographic Microscopy

3D Locating and Sizing of Volumetric Metal Droplets with Astigmatic Dual-Beam Interferometric Particle Imaging at Panoramic Scattering Angle

Microscopic Three-Dimensional Measurement Based on Telecentric Stereo and Speckle Projection Methods

Non-spherical Janus microparticles localization using equivalent geometric center and image processing

Modeling and Experiment on 3D Position and Size Measurement of Opaque Droplet Cloud with Astigmatic Dual-Beam Interferometric Particle Imaging (ADIPI)

High-speed Astigmatic Dual-Beam Interferometric Particle Imaging for Direct Depth Displacement and Velocity Measurement of Metal Droplet

Location-Free Optical Microscopic Imaging Method with High-Resolution Based on Microsphere Superlenses

Super-resolution Three-Dimensional Topography Measurement Using Microsphere-Aided Broadband Light Interferometry

Profile Measurements of Micro-Aspheric Surfaces Using an Air-Bearing Stylus with A Microprobe

A dual-probe three-dimensional profile measurement system

A METHOD OF MICRO-SPHERE COMPLETE POSITION BASE ON PERPENDICULAR AXIS AND POSITIONING ACCURACY ANALYSIS

Measurement of 3-D Profile Using Micro Fringe Projection Correlation Method

Three-Dimensional Measurement Based On A Greenough-Type Stereomicroscope Using Phase-Shifting Projection

Three-Dimensional Tracking of Fluorescent Particles Applied to Micro-Fluidic Measurements

Research and Development of Light Field Microscope for Measuring 3D Microstructures

3D particle tracking using a dual-objective fluorescent reflection system with spherical aberration