Depolarization Artifacts in Dual Rotating-Compensator Mueller Matrix Ellipsometry

Weiqi Li,Chuanwei Zhang,Hao Jiang,Xiuguo Chen,Shiyuan Liu
DOI: https://doi.org/10.1088/2040-8978/18/5/055701
IF: 2.1
2016-01-01
Journal of Optics
Abstract:Noticeable depolarization effects are observed in the measurement of the air using an in-house developed dual rotating-compensator Mueller matrix ellipsometer. We demonstrate that these depolarization effects are essentially artifacts and mainly induced when the compensator with wavelength-dependent optical properties is integrated with the finite bandwidth detector. We define a general formula to represent the actual Mueller matrix of the compensator by taking into account the depolarization artifacts. After incorporating this formula into the system model, a correction method is further proposed, and consequently, improved accuracy can be achieved in the Mueller matrix measurement.
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