Abstract:We have designed and constructed a new type of spectroscopic ellipsometer to study the optical properties of materials in the 3500-8000-Å wavelength range. In the system, the analyzer and polarizer are driven 10(4) steps/revolution by two stepping motors that have hollow shafts and rotate synchronously with a speed ratio of 2:1, i.e., A = 2P. Both the polarizer and analyzer are mounted directly on the shafts to avoid mechanical transmission and vibration problems entirely and make the system simple and reliable. An additional source polarizer was placed in the optical path to reduce the slight polarization effects of the light source. The light intensity finally received by the detector contained five components, one dc and four ac, with frequencies of ω(0), 2ω(0), 3ω(0), and 4ω(0), respectively. One can independently obtain the ellipsometric parameters of ψ and Δ as well as the optical constants by calculating any one of the two sets of ac signals, with a raw data self-consistency of better than 0.5%. The incident angle, aligned precisely by a laser beam, was continuously variable through a mechanical system with a computercontrolled resolution of 0.001° or a visual resolution of 0.005°. The system operations, including data acquisition and reduction, high-voltage control of the photomultiplier, incident angle, as well as wavelength setting and scanning, were fully and automatically controlled by a 386-based microcomputer. We self-calibrated the system by adjusting and setting precisely the initial azimuthal angles of the prisms. The results from the measured spectra of the complex refractive index for a gold-film sample are presented, and we show that the data obtained at three different incident angles of 65°, 70°, and 75° are remarkably consistent with one another. A comparison of the two results from the ellipsometry and reflectance measurements is given. The experimental skills and system error reduction are discussed in detail.

Polarization Mixing Error in Transmission Ellipsometry with Two Acousto-Optical Modulators

Analysis of Frequency Mixing Error on Heterodyne Interferometric Ellipsometry

Effect of Nonpolarizing Beam Splitter on Measurement Error in Heterodyne Interferometric Ellipsometers

Analysis of Polarization Error of Sensors Based on Michelson Interferometer

Nonlinear error introduced by beam splitters in an interferometric ellipsometer

Alignment Technique for Polarization-Based Optical-Systems

Optimal Polarization Modulation for Orthogonal Two-Axis Lloyd’s Mirror Interference Lithography

Influence of Nonpolarizing Beam Splitters on Measurement Accuracy in Interferometric Ellipsometers

Mach-Zehnder Optical Interferometric Polarimeter Using Two Reference Beams with Different Heterodyne Frequency

High resolution polarization nulling measurement system with magneto-optical modulator

A polarimeter based on electric-optical material

Zeeman laser interferometer errors for high-precision measurements

Polarization error in resonant micro-optic gyroscopewith different waveguide-type ring resonatorstructures

Self-Mixing Interferometry with Mutual Independent Orthogonal Polarized Light

Fiber self-mixing interferometer with orthogonally polarized light compensation.

High-accuracy Self-Mixing Interferometer Based on Single High-Order Orthogonally Polarized Feedback Effects

Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer

Error Analysis of Frequency Mixing on Heterodyne Interferometry Detecting Device for Superfinish Surface Scratch

Investigation of Heterodyne Interferometer Technique for Dynamic Angle Measurement: Error Analysis and Performance Evaluation

Common-path Heterodyne Self-Mixing Interferometry with Polarization and Frequency Multiplexing

Self-Mixing Interference in Dual-Polarization Microchip Nd : Yag Lasers