Surface Characterization of A Au/Cnt Composite for A Mems Switching Application

Hong Liu,John W. McBride,Mohd Zamri M. Yusop
DOI: https://doi.org/10.1109/nano.2016.7751537
2016-01-01
Abstract:Multi-walled carbon nanotubes (MWCNTs) have been used to improve the lifetime of electrical contacts of MEMS switches. The surface, usually gold-coated, demonstrates a complex structure. Due to the space between vertically aligned nanotubes, the sputtered gold penetrates into CNT. The surface of the composite also presents a much higher roughness than metal-coated surfaces. This work investigates the surface features of the gold-coated MWCNT composite, as well as the gold penetration into MWCNT. Different techniques are used in the study, namely TEM, SEM, AFM and optical surface profiler.
What problem does this paper attempt to address?