Diagnostics of Metal Plasma in Radio Frequency Glow Discharge During Electron Beam Evaporation

Yu Yong-Hao,Wang Lang-Ping,Wang Xiao-Feng,Jiang Wei,Chen Qiong
DOI: https://doi.org/10.1088/0256-307x/32/8/085201
2015-01-01
Abstract:A new method for generating metal plasma via radio frequency (rf) glow discharge during electron beam evaporation is proposed. A probe array and an emission spectrometric analysis are employed to identify the metal plasma during rf glow discharge. Spectral results reveal that the Ti metal vapor is ionized and forms a metal plasma via rf glow discharge. The dependence of the emission intensities of Ti+ and Ti atoms on rf glow discharge parameters is investigated. The results show that, as rf power increases, the emission intensities of Ti+ are enhanced while the emission intensities of Ti atoms are suppressed due to a constant Ti atom flux and an increasing Ti+ flux. Furthermore, the emission intensities of Ti+ and Ti atoms increase with the electron-beam current. The influence of rf glow discharge parameters on the ion-beam current density is also studied. The results show that the ion-beam current density rises with increasing the rf power and the electron-beam current. The ion-beam current density at 4-cm radial distance doubles from 8x10(9)/cm(3) up to 1.7x10(10)/cm(3) with increasing the rf power from 90 to 240W and it increases almost five-fold in the electron-beam current range of 170-230mA at 10-cm radial distance. Additionally, the increasing ratio of the ion-beam current density at the large radial distance is greater than that in the central region resulting from the driving force which is brought about by a pressure difference and the discharging action.
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