Study on the Preparation of Multicomponent Superhard Filmswith PVD Method at Low Temperature

彭志坚,齐龙浩,刘大鹏,李文治,苗赫濯
DOI: https://doi.org/10.3969/j.issn.1673-2812.2003.01.029
2003-01-01
Materials Science and Engineering
Abstract:A detailed review was made on the development of multicomponent hard films and/or coatings,including polycrystalline coatings,multilayered coatings,superlattice films,and functionally graded coatings.The problems and solutions for the preparation at low temperature were indicated.Some deposition techniques,for example,magnetron sputtering ion plating,reactive ion plating,activated reactive evaporation,cathodic multi-arc evaporation and its reactive variants,were recommended.All the parameters that affected the formation and properties of the films or coatings were summarized.The routes to realize the homogeneous deposition of PVD films or coatings on three-dimensional(3D)parts were discussed.the development trends were proposed.
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