Study on the Phase Composition of Multicomponent Superhard Coatings Prepared by PVD at Low Temperature

彭志坚,苗赫濯,刘亮,齐龙浩,司文捷,李文治
DOI: https://doi.org/10.3969/j.issn.1673-2812.2003.05.034
2003-01-01
Materials Science and Engineering
Abstract:In this paper, the development of multicomponent superhard coatings or films, including multicomponent solid-solution coatings, multilayered coatings, functionally graded coatings, and superlattice films, were reviewed. The problems of studying and predicting the phase compositions of multicomponent superhard coatings prepared at low temperature were indicated.The possible phase compositions and their properties were discussed.The theoretical methods to predict their typical properties for these coatings or films were reviewed.
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