Abstract:Liquid hydrosilanes are required for the production of silicon films. The silicon layers can be processed for electronic devices like transistors or thin‚Äźfilm solar cells. Hydrosilanes are highly reactive and pyrophoric. Therefore, the synthesis of these compounds is challenging and dangerous. The available synthesis methods for hydrosilanes are reviewed and compared. Hydrosilanes are highly attractive compounds, which can be processed as liquids with printing technology to amorphous silicon films on nearly any solid substrate. The silicon layers can be processed for electronic devices like transistors or thin‚Äźfilm solar cells. The endothermic character of hydrosilanes with their positive enthalpies of formation results in favorable properties for processing. The larger the molecules, the lower their decomposition temperature and the higher their photoactivity. Cyclic hydrosilanes such as cyclopentasilane and cyclohexasilane can be easily deposited. The branched neopentasilane is more difficult to deposit but yields better‚Äźquality films after processing. The key challenge is the complex synthesis of the precursors and the hydrosilanes. The available preparative methods are presented in this review and their advantages and disadvantages are evaluated. The following synthesis methods are presented and discussed in this article: Wurtz coupling and other reductive coupling processes, dehydrogenative coupling of silanes, plasma synthesis of chlorinated polysilanes, amine‚Äź or chloride‚Äźinduced disproportionations, and transformation of monosilane to higher silanes. Plasma synthesis is already carried out today as a continuous industrial process. The most effective synthesis methods in the laboratory are currently amine‚Äź and chloride‚Äźinduced disproportionations. There is a great need to further optimize the syntheses of hydrosilanes and to develop new simple synthesis variants.

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Potential Hazards of SiH4:N2 Mixture with Lean Oxygen

Chemical Properties of SiH_4

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Experimental Investigation of the Combustion Characteristics and Thermal Hazards of Methylsilyl-Modified Silica Aerogels

Distribution, Migration and Transformation of Siloxanes in Environment and Its Impact on Biogas Application

Challenges in the Synthesis and Processing of Hydrosilanes as Precursors for Silicon Deposition

Review of recent findings on occurrence and fates of siloxanes in environmental compartments

Numerical Investigation on Three-Dimensional Dispersion and Conversion Behaviors of Silicon Tetrachloride Release in the Atmosphere

A Hot-Wall Tubular Reactor for Silane Pyrolysis: Modeling and Simulation

Spherical Expanding Flame in Silane-Hydrogen-Nitrous Oxide Mixtures

Optimal Ventilation Design for Flammable Gas Leaking from Gas Box Used in Semiconductor Manufacturing: Case Study on Korean Semiconductor Industry

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Emission and occupational health risk assessment of harmful contaminants in various processes in a typical semiconductor manufacturing industry building

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Flammability and Oxidation Kinetics of Hydrophobic Silica Aerogels.

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Toxicity of Silicon Compounds in Semiconductor Industries