Microstructure and properties of diamond-like carbon deposited at room temperature

蔺增,巴德纯,刘铁林,程翔
DOI: https://doi.org/10.3969/j.issn.1002-0322.2004.04.020
IF: 4
2004-01-01
Vacuum
Abstract:Diamond-like carbon (DLC) films were successfully deposited on the silicon, glass and stainless steel substrates at normal temperature prepared by radio frequency plasma enhanced chemical vapour deposition(RFPECVD) method. The films have smooth surfaces and good adhesions to the substrates. The morphlolgy, microstructre and composition of the films were characterized using Raman spectroscopy, FTIR, SEM. Friction coefficients of the films were tested with ball-on-disk tribometer. By optimizing the deposition parameters, DLC films with friction coefficients lower than 0.01 against the (100Cr6) steel ball were obtained. The wear mechanism of DLC was studied by SEM and micro-Raman analysis.
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