NONDESTRUCTIVE MEASUREMENT OF THE THICKNESS OF FILM MATERIAL BY X-RAY ANALYZER

姜传海,叶长青,周健威,吴建生
DOI: https://doi.org/10.3969/j.issn.1000-6656.2004.02.007
2004-01-01
Abstract:Based on the theory of X-ray diffraction and absorption, a method for measuring the thickness of film material according to the diffraction intensity of the matrix below film was established. The thickness of the TiN film on high-speed steel was measured by X-ray analyzer. It was found that the film thickness could be measured accurately by using the method.
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