Dynamic Simulation and Testing of a Novel Piezoelectric Nanomotor

段智勇,王庆康,曾令刚,费继承

DOI: https://doi.org/10.3321/j.issn:1004-924x.2004.03.008

2004-01-01

Optics and Precision Engineering

Abstract:A nanometer precision stepper piezoelectric motor has been designed and fabricated based on converse piezoelectric effect. From the simple model established from the motor's configuration, dynamic characteristic equations are deduced with pulses applied on the piezoelectric stack. The movement of the motor was simulated with some coefficients applied. The results of the simulation show that the motor is a linear stepper motor. A grating testing system was designed to test the piezoelectric motor. The experimental results prove that the simulations are true. This piezoelectric nanomotor can achieve serial step movement at higher speed with higher resolution in longer range, and it is easy to control by computer. The displacement resolution of the motor could be 10 nm at 0.6 mm/s in the range is 5 cm.