Study on MEMS Micro-Thruster Technology

尤政,张高飞,任大海
DOI: https://doi.org/10.3969/j.issn.1672-6030.2004.02.005
2004-01-01
Abstract:Spatial thruster is the important component for orbit maintenance, station keeping as well as special attitude control of the microsatellite. With the development of micro/nano satellites and their constellation and formation flying, more advanced spatial propulsion technology is required. In this paper, the review of MEMS-based micropropulsion developments is summarized. Based on it, the overall structure scheme of MEMS micro-thruster arrays is presented. Then the simulation and analysis of mechanical property of thruster unit, the fabrication of micro-thruster arrays prototype and the prediction of thrust force are introduced.
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