Development of a MEMS Based Colloid Thruster with Sandwich Structure

JJ Xiong,ZY Zhou,D Sun,XY Ye
DOI: https://doi.org/10.1016/j.sna.2004.05.029
IF: 4.291
2005-01-01
Sensors and Actuators A Physical
Abstract:Design of a propulsion system with mini-size, high specific impulse and extremely low impulse bit is highly demanded by micro and nano spacecrafts. In this paper, a MEMS based micro colloid thruster has been developed by bulk silicon processing. The dimensions of the new thruster have been reduced considerably, which allows the micro thrusters to use a working voltage of 1–3kV instead of 5–10kV traditionally. The emitter of the thruster is designed to enable fine thrust control in the micro Newton range. A cantilever-based test facility is further developed to test the micro colloid thruster. Experimental results show that a thrust in the order of micro Newton can be produced by a single emitter, with a working threshold voltage as low as 1400V.
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