Abstract:AbstrcatCrack-free homogeneous nanoporous silica films on silicon wafers has been synthesized via a supercritical drying of wet gel films that were obtained by spinning coating the polymeric silica sol using acid/base two step sol-gel method with tetraethoxysilane(TEOS) as precursor. The nanoporous film is amorphous and three-dimensioned network, cross-linked by the primary particles which sizes distributed between 30～40nm showed by XRD and AFM. The thickness and refractive index of the silica films were measured by spectroscopic ellipsometry. The silica films' thickness is 300～1100nm, refractive index is 1.13～1.23, porosity is 50%～70% and dielectric constant is 1.9～2.4. The silica films' thickness increases as the solvent isopropanol (IPA) amount reduced, catalyst NH_4OH amount increased, SiO_2 sol viscosity increased and spin speed reduced. The films' dielectric constant loweres as NH_4OH amount and SiO_2 sol viscosity increases while IPA amount and spinning speed has little effect on the films' dielectric constant.

MICROPOROUS SILICA FILMS DERIVED BY SOL-GEL GRANULAR SILICA SOL

Nano-porous Silica Films Prepared by sol-gel Granular Silica Sol

Fabrication and characteration of nanoporous silica film

Preparation and Characterization of Low Dielectric Constant Porous Sillica Films

Fabrication and characterization of nanoporous silica film

Microstructure Control of Nanoporous Silica Thin Film Prepared by Sol-Gel Process

The structure and mechanism of porous silica films by sol–gel method using poly(ethylene glycol) and side-chain polyether modified polydimethylsiloxane with terminal Si–CH 3 as templates

Preparation and Characterization of Nanoporous Silica Film

Preparation of Methyltrimethoxysilane Derived Silica Aerogel Films via Ambient Pressure Drying

A Novel Fabrication of Meso-Porous Silica Film by Sol-Gol of TEOS

Preparation of Silica Hybrid Films on PMMA by Sol-Gel and Solvothermal Methods

Effects of Coating Methods on Microstructure and Optical Properties of Mesoporous Silica Films

Preparation of Nanometer Porous Silica Thin Films by the Sol-Gel Technique and Their Porosity Control

Deposition of Nanoporous Silica Thin Films by Sol-Gel

New Method for Making Porous SiO2 Thin Films

Fabrication of Binary Colloidal Crystals and Complex Ordered Mesoporous Silica Films Via Sol-Gel Technology

Effects of Experimental Conditions on the Properties of Nanoporous Silica Films

A New Method to Control Nano-Porous Structure of Sol-Gel-derived Silica Films and Their Properties

Structure Control and Stability in Preparation of Silica Film Via Sol-Gel Process

STUDIES ON THE MICROSTRUCTURAL EVOLUTION OF AS ILICON OXIDE PHASE IN A SOLUBLE POLYIMIDE／SILICA NANOCOMPOSITES

Preparation of Low-Density Porous Silica Thin Films by Ambient Pressure Drying