Research and Fabrication of NiCrAlY Thin-Film Strain Gauges

ZHANG Jie,YANG Xiao-dong,JIANG Shu-wen,JIANG Hong-chuan,ZHAO Xiao-hui,ZHANG Wan-li
DOI: https://doi.org/10.13873/j.1000-9787(2015)04-0105-03
2015-01-01
Abstract:NiCrAlY thin film strain gauges are deposited on the nickel-based superalloy by radio-frequency magnetron sputtering. The effects of stabilized heat treatment at 1 000℃ on structure and surface morphology of NiCrAlY thin films are investigated and the electromechanical properties of NiCrAlY thin film strain gauges are measured. After stabilized heat treatment at 1 000℃,a layer of Al2 O3 is formed on the surface of NiCrAlY thin film,which is important cause for excellent high-temperature oxidation resistance. The variation of strain gauge resistance with temperature is linear in the temperature range from room temperature to 800℃. The temperature coefficient of resistance( TCR) is about 290 × 10-6/℃,and gauge factor( GF) is about 2. 1 at room temperature.
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