ZnO Film Growth in a Preferred Orientation

马勇,王万录,廖克俊
DOI: https://doi.org/10.3321/j.issn:1005-023x.2003.z1.063
2003-01-01
Abstract:ZnO films have a wide variety of applications. Recently, they have come to the forefront of research. The strong c-axis orientation is one of characteristics of high-quality ZnO films. ZnO films can be deposited by a variety of deposition techniques. Magnetron sputtering, metal-organic chemical vapor deposition, pulsed laser deposition, molecular beam epitaxy and reactive e-beam evaporation are main methods for the preparation of high-quality ZnO films with strong c-axis orientation. In this work, the above methods and their developments are reviewed. Finally,current drections of research on ZnO films are described.
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