Hetero-Growth Of (100) Orientated Zno Films On Silicon By Ss-Cvd

Jianguo Lü,Zhizhen Ye,Hanhong Chen,Jingyun Huang,Binghui Zhao
DOI: https://doi.org/10.1142/S0217979202015194
2002-01-01
International Journal of Modern Physics B
Abstract:ZnO films with (100) preferred orientation are reported for the first time. ZnO films were synthesized on Si(100) substrate by solid-source chemical vapor deposition (SS-CVD) using zinc acetate dihydrate (solid) as a precursor. The structural properties were investigated by X-ray diffraction and atomic force microscopy. Results show that a lower growth temperature and a higher deposition rate will facilitate the formation of (100) texture. The texture coefficient for (100) plane is 3.28.
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