Sr-F Codoped SnO2Transparent Conductive Film

LIU Xing-yuan
DOI: https://doi.org/10.3788/fgxb20153607.0829
2015-01-01
Abstract:Sr-F codoped SnO2 ( SFTO) transparent conductive oxide films were prepared by ion-as-sisted electron beam deposition at a low temperature. The films show electrical resistivity of less than 3. 9 × 10 -3 Ω·cm, high average optical transmittance of 85% from 380 nm to 2 500 nm, and high work function of about 5. 1 eV. The films are amorphous and have favorable surface morphology with average roughness of about 1. 5 nm. The deposition temperature of SFTO film is 300 ℃, which is much lower than that of FTO products. SFTO transparent conductive amorphous thin film can be ex-pected to be directly prepared on flexible plastic ( PI, PAR or PCO) substrate, in order to obtain flexible electrodes with good performance.
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