Abstract:To address the issues of large imaging errors for small defects and the difficulty in depth evaluation using local wavenumber estimation for surface defect imaging, a novel three-dimensional (3D) evaluation method for surface defects using broadband laser-generated Rayleigh waves with wavenumber analysis is proposed. A finite element model is established to investigate the interaction between the Rayleigh wave and the surface defect and reveal the wavenumber change mechanism of the non-dispersive Rayleigh wave in the case of defects. It is discovered that when the Rayleigh wave encounters the surface defect, various mode-converted scattered waves are generated, resulting in the appearance of new components with wavenumbers lower than that of the incident Rayleigh wave in the wavenumber domain. Additionally, the maximum amplitude of the Rayleigh wave in the B-scan image increases as the defect depth increases. Based on the simulation analysis, a 3D evaluation method for surface defects is proposed. Firstly, the scattered Rayleigh wave caused by the defect is extracted using frequency-wavenumber analysis. Secondly, a space-frequency-wavenumber analysis is used to determine the local wavenumber of the scattered Rayleigh wave for defect imaging. Finally, the defect depth is estimated by analyzing the maximum amplitude of the Rayleigh wave. A surface defect detection experiment is conducted to verify the effectiveness of the proposed method, and the experimental results demonstrate that the proposed method can suppress noise interference and accomplish high-precision imaging of small surface defects compared to the traditional method. Moreover, the method can establish a linear mapping relationship between the defect depth and the maximum amplitude of the Rayleigh wave for depth evaluation. The research results can provide a potential application for the 3D evaluation of surface defects.

Study on Micro Bulk Defects Detection in MEMS Components

Theoretic and Experimental Study on Micro Bulk Defects in Semiconducting Materials by Laser Scanning Analysis Technology

Numerical simulation research and applications on scattering imaging of surface defects on optical components

Theoretical and experimental study of laser detecting technique for micro bulk defects in silicon

Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method

New laser non-destructive method of detecting micro/nano bulk defects in silicon materials

Detection of Micro-Sized Air Bubble Defects in Optical Glass Based on Mie Theory

Defects Evaluation System for Spherical Optical Surfaces Based on Microscopic Scattering Dark-Field Imaging Method

A Novel 3D Evaluation Method for Surface Defects Using Broadband Laser-Generated Rayleigh Waves with Wavenumber Analysis.

Quantitative Detection of Surface Defect Using Laser-Generated Rayleigh Wave with Broadband Local Wavenumber Estimation

Detecting features of defect metal based on laser ultrasonic technique

Width and Depth Gauging of Rectangular Subsurface Defects Based on All-Optical Laser-Ultrasonic Technology

Automatic evaluation system for bulk defects in optics

Diffraction method for inspecting the defects of lenses with various curvature

Research of Light Reflex Surface Defects Detection Technology

Composite scattering characteristics analysis of micro-ellipsoidal periodic structure optical surface and microdefects

A Study of Internal Defect Testing with the Laser-Emat Ultrasonic Method.

Depth localization of subsurface defects by optical dark-field confocal microscopy

Study on Characteristics of Composite Light Scattering of Square Pore Periodic Structure with Defect Particles

Modeling Study of Laser Beam Scattering by Defects on Semiconductor Wafers

Simulation research of metal defect detection based on laser untrasonic surface wave