Abstract:In inertial confinement fusion (ICF) systems, damage induced by high power lasers is one of the key factors for limiting the further improvement of energy density. Also, there is a close relationship between various defects and damage characteristics of optical components. Usually, the optical components detected in the system have a large-aperture and a variety of surface types. The defects have the characteristics of small scale, low distribution density and wide distribution range, etc. It is a great challenge to achieve multi-faceted detection with high precision and efficiency. In this paper, according to the requirements for micro defects detection on the surface of large-aperture optical components, a multimodal scanning detection method combining the bright-field and dark-field imaging (BDFI) is given. Based on the high sensitivity of dark-field microscopic imaging (DFMI), the ring illumination strategy of collimate light source is studied to locate defects globally. The coaxial illumination method is used to accurately detect the characteristic parameters of defects, which is able to realize the size quantification of multi-morphological defects. At the same time, in order to cope with the detection needs of large-aperture and multi-faceted optical components, the sub-aperture scanning method based on the distribution structure of geodesic sphere is proposed. The multi-aperture scanning path is automatically planned and the spatial distribution of defects is reconstructed with three-dimensional mapping. On this basis, by cooperating with the automatic motion device, automatic focus and high-speed automatic scanning of detection can be realized. The methods proposed in this paper can be accomplished for efficient detection of large-aperture optics with a resolution of 0.5 mu m for surface defects, which meets the needs of multi-faceted detection. Therefore, it is of great significance to guide the precision machining of optical components and support the process optimization, which has great importance for the final research results of the ICF system.

Detection of Defects in Optics Based on Scanning

Error Analysis of Sub-Aperture Synthesis for Detecting Surface Defects of Optical Components

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Defects Evaluation System for Spherical Optical Surfaces Based on Microscopic Scattering Dark-Field Imaging Method

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Distortion Correction in Surface Defects Evaluating System of Large Fine Optics

Detection of Micro-Sized Air Bubble Defects in Optical Glass Based on Mie Theory

A high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface

A Novel 3D Evaluation Method for Surface Defects Using Broadband Laser-Generated Rayleigh Waves with Wavenumber Analysis.

Numerical simulation research and applications on scattering imaging of surface defects on optical components

Quantitative Detection of Surface Defect Using Laser-Generated Rayleigh Wave with Broadband Local Wavenumber Estimation

Automatic evaluation system for bulk defects in optics

Diffraction method for inspecting the defects of lenses with various curvature

Width and Depth Gauging of Rectangular Subsurface Defects Based on All-Optical Laser-Ultrasonic Technology

Automatic Identification and Classification of Surface Defects in Small-Sized Optics

Evaluation of Internal Defects in Optical Component Via Modified-3Pie

Optical Element Surface Defects Detection and Quantitative Evaluation Standard Based on Dark-Field Imaging

Research on Defect Detection of Large-Aperture Multi-Faceted Optical Components

Scanning strategy for surface defects evaluation of large fine optical components

Efficient and Precise Detection for Surface Flaws on Large-Aperture Optics Based on Machine Vision and Machine Learning

Defect detection and current situation of optical components