Investigation of Domain Distribution Using Scanning Piezoelectric Microscopy for PZT Thin Films with Different Dopants

舒剑,于艳菊,巴龙
DOI: https://doi.org/10.3969/j.issn.1000-6281.2003.02.020
2003-01-01
Abstract:The distribution of ferroelectric domain of PZT thin film and La, Eu doped PZT thin films were investigated using scanning piezoelectric microscopy. The experimental results showed that the surface ferroelectric domains of sol-gel derived PZT,(Pb 0.93La 0.07)(Ti 0.6Zr 0.4)O 3, (Pb 0.95Eu 0.05)(Zr 0.52Ti 0.48)O 3 and (Pb 0.9Eu 0.1)(Zr 0.52Ti 0.48)O 3 had different structure at spontaneous polarization. The thin film with 5% Eu dopant had the highest spontaneous polarization, and the boundaries of most domains were the same to the grain boundary. The variation of the contrast of domain was observed by changing the amplitude of alternate voltage applied to the cantilever. It showed that some domains were getting unstable while higher voltage was applied, and their polarized orientations were different to those at spontaneous polarization. The linear increasing of the contrast at some locations means that the grain was penetrative across the depth of the thin film, the coersive field was higher than applied field, and the defects were lower for evident loss of piezoelectricity at this area.
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