Grazing Incidence X-ray Diffraction Study of La0.7Ca0.3MnO3 Film

谭伟石,蔡宏灵,吴小山,蒋树声,贾全杰,郭立平,何庆,高矩

DOI: https://doi.org/10.3321/j.issn:0253-3219.2004.12.008

2004-01-01

Nuclear Techniques

Abstract:La_(0.7)Ca_(0.3)MnO_3(LCMO) thin films with the thickness of 500 A were deposited on(001)-oriented single crystal SrTiO_3(STO), MgO and α-Al_2O_3(ALO) by 90° off-axis radio frequency magnetron sputtering. Grazing incidence X-ray diffraction technique, associated with normal X-ray diffraction, was adopted to measure the in-plane lattice parameter and investigate the lattice strain and strain relaxation in LCMO films. The results indicate that critical thickness of strain relaxation is very small, which may be related to large mismatch between film and substrate. The mechanism for strain relaxation in LCMO film is perhaps different from that for tetragonal distortion. Furthermore, the in-plane growth orientation of LCMO film on STO and MgO was also studied by grazing incidence X-ray diffraction and the result is consistent with that from transmission electron microscopy.