Polycrystalline ZrB2 Coating Prepared on Graphite by Chemical Vapor Deposition

Peng Wang,Yushi Qi,Shanbao Zhou,Ping Hu,Guiqing Chen,Xinghong Zhang,Wenbo Han
DOI: https://doi.org/10.1002/pssb.201552752
2016-01-01
physica status solidi (b)
Abstract:Polycrystalline ZrB2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl4, BCl3, H-2, and Ar at 1200 degrees C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO2 and B2O3 detected on the surface of ZrB2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB2 grains. The feasibility of preparation of ZrB2 on graphite by CVD using ZrCl4, BCl3, and H-2 was verified. (C) 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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