Abstract:This paper presents an AlN-based piezoelectric micromachined ultrasonic transducer (PMUT) with a double-beam suspended structure. In order to obtain greater deflection displacement and output sound pressure compared to standard systems, a suspended structure is proposed, achieved by utilizing double-sided deep reactive ion etching of the silicon substrate. This structure is capable of greatly reducing the tensile stress caused by deflection on the membrane edge, thereby improving the piezoelectric micromachined ultrasound transducer performance. Simulations are performed using the finite element method and COMSOL software, with results demonstrating that the suspension structure exhibits a lower resonant frequency and a larger membrane deflection displacement than other methods, implying higher penetration and acoustic energy levels. Thus, the sound pressure is improved by changing the PMUT structure. Moreover, a PMUT with a double-beam is fabricated, and the impedance diagram is determined with an impedance analyzer. The resonant frequency of the transducer was 31.88 kHz, while the sound wave received by the standard lead zirconate titanate (PZT) ultrasonic transducer was converted to a voltage of 277.5 mV. In comparison, the proposed PMUT demonstrates an improved acoustic emission performance. In addition, the electromechanical coupling coefficient of the suspended PMUT is observed to be approximately 3.08%, which is significantly better than that of a fully clamped PMUT. This demonstrates the strong electromechanical conversion performance of the proposed PMUT. Results from the transmission and reception air experiments prove that the proposed double-beam PMUT can potentially be used for ranging and wireless energy transmission applications.

Comparative Characterization Of Bimorph And Unimorph Aln Piezoelectric Micro-Machined Ultrasonic Transducers

An Aln-Based Piezoelectric Micromachined Ultrasonic Transducer with a Double-Beam Suspended Structure

Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking

Wafer-level experimental study of residual stress in AlN-based bimorph piezoelectric micromachined ultrasonic transducer

Fabrication and Characterization of AlN Based Piezoelectric Micromachined Ultrasonic Transducer for Contact Sensing

An Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer (Pmut) Array

Dual-Electrode Bimorph Pmut Arrays for Handheld Therapeutic Medical Devices

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

Fabrication Process and Performance Analysis of AlN Based Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Structure.

Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array.

A Sc$_{\text{0.096}}$Al$_{\text{0.904}}$N-Based Bimorph Piezoelectric MEMS Microphone Using 3 $\times$ 3 Circular Diaphragms

Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

Modeling and Characterization of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers

A Piezoelectric Micromachined Ultrasonic Transducer with Mechanical Grooves

Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications

High Voltage Excitation And Nonlinear Transmission Of A 16 Mhz Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer

PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm

Piezoelectric Micromachined Ultrasonic Transducers with Center Support Membrane

Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films

Comparison about Design Methods of Tonpilz Type Transducer

Study on AlN Micromachined Ultrasonic Transducer Array with Beamforming