Increasing Fluorine Concentration to Control the Microstructure from Fullerene-Like to Amorphous in Carbon Films

Lifang Zhang,Jia Wang,Junyan Zhang,Bin Zhang
DOI: https://doi.org/10.1039/c6ra00675b
IF: 4.036
2016-01-01
RSC Advances
Abstract:a-C:H:F films with different fluorine contents are deposited, leading to different microstructures being formed; including fullerene-like fragments, interlocking pores, and disordered structures.
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