Growth and Photoluminescence of Si-SiOx Nanowires by Catalyst-Free Chemical Vapor Deposition Technique

Yue Yu,Ruiying Luo,Haidong Shang
DOI: https://doi.org/10.1016/j.apsusc.2016.01.251
IF: 6.7
2016-01-01
Applied Surface Science
Abstract:We developed a one-step catalyst-free chemical vapor deposition process to synthesize Si-SiOx nanowires using tetraethoxysilane as the precursor. Observations using scanning electron microscopy showed that the Si-SiOx nanowires were 20-50 nm in diameter and tens of microns in length. The high-resolution transmission electron microscope analysis and X-ray diffraction demonstrated that the nanowires consisted of crystal silicon and amorphous SiOx. The Si and 0 with an atomic ratio of the Si-SiOx NWs were 1:1.2 according to the energy dispersion X-ray spectroscope. A systematic study on the effect of the growth conditions, such as reaction temperature, the reaction time, and the TEOS vapor flow rate was performed. The formation of Si-SiOx nanowires was implemented by the non-classical crystallization mechanism. The charged nanoparticles acting as building blocks self-assembled into nanowires. The photoluminescence measurements were carried out and showed that the Si-SiOx nanowires emitted stable ultraviolet and green luminescence excited by ultraviolet light. (C) 2016 Elsevier B.V. All rights reserved.
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