Surface Elemental Microanalysis With Submicron Lateral Resolution By The Laser-Ablation Laser-Induced Fluorescence Technique

J. Kang,Y. R. Wang,R. H. Li,Y. Q. Chen
DOI: https://doi.org/10.1364/OE.26.014689
IF: 3.8
2018-01-01
Optics Express
Abstract:In order to realize surface elemental microanalysis of solid samples with submicron lateral resolution, laser-ablation (LA) combined with high sensitive laser-induced fluorescence (LIF) detection was investigated. A 532 nm or 266 nm nanosecond laser pulse with low pulse energy was used to realize submicron laser-ablation on the surface of a copper alloy, and LIF technique was used to sensitively detect a minor lead element in the ablated samples. similar to 344 nm and similar to 267 nm lateral resolutions could be achieved experimentally under 532 nm and 266 nm laser ablations under the current experimental condition, respectively. This demonstrated the feasibility of using a LA-LIF technique for surface elemental microanalysis of solid samples with submicron spatial resolution. The potentials of continually improving the spatial resolution of this technique to nanoscale were discussed. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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