High-Sensitivity Fabry-Perot Interferometric Acoustic Sensor for Low-Frequency Acoustic Pressure Detections

Zhenfeng Gong,Ke Chen,Xinlei Zhou,Yang,Zhihao Zhao,Helin Zou,Qingxu Yu
DOI: https://doi.org/10.1109/jlt.2017.2761778
IF: 4.7
2017-01-01
Journal of Lightwave Technology
Abstract:We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 mu Pa/Hz(1/2) at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.
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