Polymer Diaphragm Based Fiber Optic Fabry-Perot Acoustic Sensor

Qiaoyun Wang,Zhenhe Ma
DOI: https://doi.org/10.4028/www.scientific.net/amm.401-403.1087
2013-01-01
Applied Mechanics and Materials
Abstract:This paper presents a polymer diaphragm based Fabry-Perot (F-P) sensor system for aero acoustic measurement in air. The diaphragm of a novel polymer material poly phthalazinone ether sulfone ketone (PPESK) is used as the sensing element. The effective dimension of the diaphragm is 1.0mm in diameter and 6µm in thickness. With the interferometric-intensity demodulation mechanism, the sensitivity of sensor is 0.72 nm/Pa (corresponds to 5.56mV/Pa) has been achieved. Experimental results showed that the characteristics of the sensor system is comparable with traditional electrical microphone in frequency range 100Hz to 1kHz and the sensor has the potential to be used as an optical microphone.
What problem does this paper attempt to address?