Abstract:Terahertz (THz) and sub-THz frequency emitter and detector technologies are receiving increasing attention, underpinned by emerging applications in ultra-fast THz physics, frequency-combs technology and pulsed laser development in this relatively unexplored region of the electromagnetic spectrum. In particular, semiconductor-based ultrafast THz receivers are required for compact, ultrafast spectroscopy and communication systems, and to date, quantum well infrared photodetectors (QWIPs) have proved to be an excellent technology to address this given their intrinsic ps-range response However, with research focused on diffraction-limited QWIP structures (lambda/2), RC constants cannot be reduced indefinitely, and detection speeds are bound to eventually meet un upper limit. The key to an ultra-fast response with no intrinsic upper limit even at tens of GHz is an aggressive reduction in device size, below the diffraction limit. Here we demonstrate sub-wavelength (lambda/10) THz QWIP detectors based on a 3D split-ring geometry, yielding ultra-fast operation at a wavelength of around 100 {\mu}m. Each sensing meta-atom pixel features a suspended loop antenna that feeds THz radiation in the ~20 m3 active volume. Arrays of detectors as well as single-pixel detectors have been implemented with this new architecture, with the latter exhibiting ultra-low dark currents below the nA level. This extremely small resonator architecture leads to measured optical response speeds - on arrays of 300 devices - of up to ~3 GHz and an expected device operation of up to tens of GHz, based on the measured S-parameters on single devices and arrays.

Detection of 3.0 THz Wave with a Detector in 65 Nm Standard CMOS Process.

A 3.0 THz Detector in 65 Nm Standard CMOS Process

Terahertz Detector for Imaging in 180-Nm Standard CMOS Process.

A 220- to 299-Ghz CMOS Terahertz Detector

A 150-to-1050 GHz Terahertz Detector in 65 nm CMOS

Design Of 1-Thz Field Effect Transistor Detectors In 180-Nm Standard Cmos Process

Monolithic resonant CMOS fully integrated triple-band THz thermal detector

A 3 THz CMOS Image Sensor

A Multi-band Terahertz Detector in 65-Nm CMOS for Spectroscopic Imaging

THz near-field intensity distribution imaging in the 0.3 THz band using a highly sensitive polarization CMOS image sensor using a 0.35 μm CMOS process

A Fully-Integrated 860-Ghz CMOS Terahertz Sensor

Ultrafast terahertz detectors based on three-dimensional meta-atoms

Terahertz Photomechanical Detector Based on Meta-surface Absorber and Enhanced Cantilevers

Ultra-fast Transistor-Based Detectors for Precise Timing of Near Infrared and THz Signals.

8x8 Patch-Antenna-Coupled TeraFET Detector Array for Terahertz Quantum-Cascade-Laser Applications

Polysilicon Terahertz Thermal Detector Based on CMOS Technology

A Novel Terahertz Detector Based on Asymmetrical FET Array in 55-nm Standard CMOS Process

Dual-frequency CMOS Terahertz Detector with Silicon-Based Plasmonic Antenna

Detection Of Terahertz Radiation Using Improved Uncooled Focal Plane Array Detector

A broadband terahertz quasi-optical detector utilizing lens-based antenna

Concurrent-Mode CMOS Detector IC for Sub-Terahertz Imaging System