Abstract:Ceramic surface microstructuring is a rapidly growing field with a variety of applications in tribology, wetting, biology, and so on. However, there are limitations to large-area microstructuring and fabrication of three-dimensional (3D) micro free forms. Here, we present a route to obtain intricate surface structures through in situ slip casting using polydimethylsiloxane (PDMS) negative molds which are replicated from excimer laser ablated polycarbonate (PC) master molds. PC sheets are ablated with a nanosecond KrF (λ = 248 nm) excimer laser mask projection system to obtain micron-scale 3D surface features over a large area of up to 3 m(2). Complex surface structures that include 3D free forms such as 3D topography of Switzerland, shallow structures such as diffractive optical elements (60 nm step) and conical micropillars have been obtained. The samples are defect-free produced with thicknesses of up to 10 mm and 120 mm diameter. The drying process of the slip cast alumina slurry takes place as a one-dimensional process, through surface evaporation and water permeation through the PDMS membrane. This allows homogeneous one-dimensional shrinkage during the drying process, independent of the sample's lateral dimensions. A linear mass diffusion model has been proposed to predict and explain the drying process of these ceramic colloidal suspensions. The calculated drying time is linearly proportional to the height of the slurry and the thickness of the negatively structured PDMS and is validated by the experimental results. An experimentally observed optimum Sylgard PDMS thickness range of ∼400 μm to 1 mm has achieved the best quality microstructured green compacts. Further, the model predicts that the drying time is independent of the microstructured areas and was validated using experimental observations carried out with microstructured areas of 300 mm(2), 1200 mm(2), and 120 cm(2). Therefore, in principle, the structures can be further replicated in areas up to 3 m(2) with the same drying time for the same slurry height. The surface-structured ceramics display interesting wetting properties, for example, eicosane-coated mesoporous microstructured alumina shows superhydrophobic behavior. Additionally, ceramic bulk samples could be further used as second-generation very hard and low-wear molds for further microfabrication.

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Laser-induced surface activation of LTCC materials for chemical metallization

Surface 3D Micro Free Forms: Multifunctional Microstructured Mesoporous α-Alumina by in Situ Slip Casting Using Excimer Laser Ablated Polycarbonate Molds

Investigation of Integrated Reactive Multilayer Systems for Bonding in Microsystem Technology

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High-Speed Laser Patterning of YSZ Ceramic Substrates for Plasma Spraying: Microstructure Manipulation and Adhesion of YSZ Coatings

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Study of Roughness Evolution and Layer Stacking Faults in Short-Period Atomic Layer Deposited Hfo2/Al2o3 Multilayers

Nanoscale mechanical properties and microstructure of 3D LTCC substrate

Surface Micromorphology and Nanostructures Evolution in Hybrid Laser Processes of Slicing and Polishing Single Crystal 4H-Sic

Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation

Study on Laser-Stricken Damage to Alumina Ceramic Layer of Different Surface Roughness

Development of Thermal Spray Coating Solution for Ceramic Substrates

Experimental studies on process-induced morphological characteristics of macro- and microstructures in laser consolidated alloys

The Characteristics of the Surface Topography of Excimer Laser Processed Al2o3 Ceramic

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Chemical effects during the formation of various types of femtosecond laser-generated surface structures on titanium alloy

Fabrication of CaSiO 3 LTCC high aspect ratio microstructure by laser chemical assisted micro-milling

Impact of substrate thickness and surface roughness on Al/Ni multilayer reaction kinetics