Abstract:Silicon nanowire field-effect transistor (SiNW-FET) sensors possess the ability of rapid response, real-time, and label-free detection with high sensitivity and selectivity in the analysis of charged molecules. Their nano-scale size makes them well suited for ultralow detection of charged molecules, but also brings the uniformity fabrication challenging, thus limiting their large-scale application. By a horizontal control approach, highly controllable silicon nanowires arrays at the top of the silicon-on-insulator (SOI) wafer (T-SiNW) were developed in our previous work. To further improve the device uniformity, here a novel SiNW fabricated approach was carefully designed by the combination of horizontal and vertical control. The new silicon nanowires appeared at the bottom of the top silicon layer (B-SiNW). The B-SiNW has a relatively low requirement on the fabrication process and better device uniformity compared to T-SiNW. These improvements resulted in the B-SiNW device with a lower current fluctuation (4.1 nA with 5.1% variations) in the flowing liquid, compared to the T-SiNW device (4.4 nA with 11% variations). Further, in quantitative detection of 40 ng/mL MMP-9, the B-SiNW sensors provided larger signals and lower fluctuation (normalized average response value: 0.57 with 4.2% variations), compared to the T-SiNW sensors (0.41 with 12.1% variations), thus indicating a more accurate bio-analysis application of the B-SiNW sensor. This work advances the nanowire sensor technology a step closer toward large-scale application to create stable sensing platforms in disease diagnosis and monitoring.

Novel Nanofluidic Chemical Cells Based on Self-Assembled Solid-State SiO2 Nanotubes

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Novel Nanofluidic Cells Based on Nanowires and Nanotubes for Advanced Chemical and Bio-Sensing Applications

Design and fabrication of a nanofluidic channel by selective thermal oxidation and etching back of silicon dioxide made on a silicon substrate

A controllable fabrication improved silicon nanowire array sensor on (111) SOI for accurate bio-analysis application

Fabrication of Ag2SiO3/SiO2 Composite Nanotubes Using a One-Step Sacrificial Templating Solution Approach

A novel MEMS compatible lab-on-a-tube technology.

Fabricating Vertically Aligned Sub-20 Nm Si Nanowire Arrays by Chemical Etching and Thermal Oxidation

<i>Ab Initio</i> Design, Shaping, and Assembly of Free-Standing Silicon Nanoprobes

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Grafting Branches and Diameter Adjustment to Nanotubes

Large-scale Assembly of Semiconductor Nanowires into Desired Patterns for Sensor Applications

A Novel Nanotube-on-Insulator (NOI) Approach Toward Single-Walled Carbon Nanotube Devices

Fabrication of Single-Crystal Silicon Nanotubes with Sub-10 Nm Walls Using Cryogenic Inductively Coupled Plasma Reactive Ion Etching.

Fabrication and Biosensing with Cnt/Aligned Mesostructured Silica Core-Shell Nanowires

Creating Sub-50 Nm Nanofluidic Junctions in PDMS Microfluidic Chip Via Self-Assembly Process of Colloidal Particles.

In-situ Growth of DNA Nanotubes from Functionalized Patterns of Poly(PEGMA) Brushes on Silicon Surface

Synthesis and Growth Mechanism of Various SiO2 Nanostructures from Straight to Helical Morphologies

Silicate-Mediated Electrolytic Silicon Nanotube from Silica in Molten Salts

Fabrication of Silicon Nanowire Devices for Ultrasensitive, Label-Free, Real-Time Detection of Biological and Chemical Species.

Large-area silica nanotubes with controllable geometry on silicon substrates