Abstract:Vanadium oxynitride (VN x O y , x+y=1) is a metallic compound between vanadium oxides (VO, V 2 O 3 , V 2 O 5 ) and vanadium nitride (VN) which would have interesting properties and functions that potentially can be supplied for different applications. In this study, vanadium nitride and oxynitride thin films were obtained by reactive magnetron sputtering using vanadium targets, Ar as plasma carrier, and a mix of N 2 and O 2 as reactive gas. The ratio of mass flow between the two gases is maintained around O 2 :N 2 =1:20 during the process. To obtain crystalline phases of oxynitrides a post rapid thermal annealing (RTP) in Ar atmosphere at 600oC and 700oC for 5 minutes was done. The purpose of the study is to define the effect of the magnetron sputtering parameters, such as reactive gas flow rates, and annealing temperature on the composition, microstructure, and optical properties of the obtained vanadium oxynitride thin films. The characterization of obtained films includes the examination of thickness and morphology by the surface profiler and SEM; identifying crystal structures and further microstructural vibration modes of molecular polarizability by X-ray diffraction and Raman spectroscopy, respectively; evaluation of the chemical composition of films by XPS analysis; assessing of optical transmittance, reflectance, and absorbance by the UV-visible- NIR spectrometer. Experimental data reveal that the annealed films can be oxynitrides when the oxygen flow rate is below 0.25 sccm and the ratio of oxygen/nitrogen ≤1/20. The annealed vanadium oxynitride films in terms of their properties are closer to vanadium nitrides than to oxides: more metallic than semi-conductive with dark appurtenance and high optical absorbance across the spectrum between 200 and 900 nm. The optical absorbance reaches almost 90% around 300 nm and then slowly reduces to 70% at 900 nm. Thus, these films could be good optical shields. For practical usage, the deposition of O 2 :N 2 =1/20, O 2 <0.25 sccm, and 600oC annealing are recommended because of the truly low transmittance (<10%) through films.

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Effect Of Annealing Processes On Composition And Thermal-Sensitive Properties Of Vanadium Oxide Thin Films

Tuning Phase Transition Temperature of VO2thin Films by Annealing Atmosphere

Impact of annealing condition on the stability and optical property of vanadium oxide thin films

Effects Of Annealing Time On The Application Of Vanadium Dioxide Films In Smart Windows

Low pressure thermal annealed fabrication of VO2 on glass with excellent optical properties

Effect of Annealing Oxygen Flow Rate on the Properties of Vanadium Oxide Films Deposited by Reactive Magnetron Sputtering

Electrical and Optical Properties of Nanostructured VOX Thin Films Prepared by Direct Current Magnetron Reactive Sputtering and Post-Annealing in Oxygen

Enhanced Post Deposition Annealing Conditions on the Fabrication of High Quality Thermochromic Vanadium Dioxide Films

Thermal transition behaviors of vanadium pentoxide film during post-deposition annealing

Study on structures and properties of vanadium oxide films prepared by Sol-Gel

Evolution of Structure and Electrical Properties with Annealing Time in Solution-Based VO2 Thin Films

Annealing-induced oxidation state transition, crystal formation, optical properties, and photocatalytic activity of vanadium oxide nanoparticles

High Infrared Reflectance Modulation in VO2 Films Synthesized on Glass and ITO coated Glass substrates using Atmospheric Oxidation of Vanadium

Effects of natural aging on the surface compositions and optical properties of thermochromic vanadium oxide films

Wafer-size VO2 film prepared by water-vapor oxidant

Thermochromatic vanadium dioxide (VO2) thin films synthesized by atomic layer deposition and post-treatments

In Situ Preparation of VO 2 Films with Controlled Ionized Flux Density in HiPIMS and Their Regulation of Thermal Radiance

(Digital Presentation) Fabrication and Characterization for Vanadium Oxynitride Thin Films By Magnetron Sputtering

Properties in Vanadium Dioxide Thin Film Synthesized from V2o5 Annealed in H-2/Ar Ambience

Optical properties of vanadium dioxide thin film in nanoparticle structure