Abstract:Vanadium oxynitride (VN x O y , x+y=1) is a metallic compound between vanadium oxides (VO, V 2 O 3 , V 2 O 5 ) and vanadium nitride (VN) which would have interesting properties and functions that potentially can be supplied for different applications. In this study, vanadium nitride and oxynitride thin films were obtained by reactive magnetron sputtering using vanadium targets, Ar as plasma carrier, and a mix of N 2 and O 2 as reactive gas. The ratio of mass flow between the two gases is maintained around O 2 :N 2 =1:20 during the process. To obtain crystalline phases of oxynitrides a post rapid thermal annealing (RTP) in Ar atmosphere at 600oC and 700oC for 5 minutes was done. The purpose of the study is to define the effect of the magnetron sputtering parameters, such as reactive gas flow rates, and annealing temperature on the composition, microstructure, and optical properties of the obtained vanadium oxynitride thin films. The characterization of obtained films includes the examination of thickness and morphology by the surface profiler and SEM; identifying crystal structures and further microstructural vibration modes of molecular polarizability by X-ray diffraction and Raman spectroscopy, respectively; evaluation of the chemical composition of films by XPS analysis; assessing of optical transmittance, reflectance, and absorbance by the UV-visible- NIR spectrometer. Experimental data reveal that the annealed films can be oxynitrides when the oxygen flow rate is below 0.25 sccm and the ratio of oxygen/nitrogen ≤1/20. The annealed vanadium oxynitride films in terms of their properties are closer to vanadium nitrides than to oxides: more metallic than semi-conductive with dark appurtenance and high optical absorbance across the spectrum between 200 and 900 nm. The optical absorbance reaches almost 90% around 300 nm and then slowly reduces to 70% at 900 nm. Thus, these films could be good optical shields. For practical usage, the deposition of O 2 :N 2 =1/20, O 2 <0.25 sccm, and 600oC annealing are recommended because of the truly low transmittance (<10%) through films.

Electrical and Optical Properties of Nanostructured VOX Thin Films Prepared by Direct Current Magnetron Reactive Sputtering and Post-Annealing in Oxygen

(Digital Presentation) Fabrication and Characterization for Vanadium Oxynitride Thin Films By Magnetron Sputtering

Optical properties of vanadium dioxide thin film in nanoparticle structure

Thermal transition behaviors of vanadium pentoxide film during post-deposition annealing

Electrical properties of single-crystal VO2(M) by RF magnetron sputtering

Preparation and Infrared Optical Properties of VO2 Nano Array

Properties in Vanadium Dioxide Thin Film Synthesized from V2o5 Annealed in H-2/Ar Ambience

In Situ Preparation of VO 2 Films with Controlled Ionized Flux Density in HiPIMS and Their Regulation of Thermal Radiance

Optical Switching and Nanothermochromic Studies of VO2(M) Nanoparticles Prepared by Mild Thermolysis Method

Nanomechanical properties of polycrystalline vanadium oxide thin films of different phase composition

Growth of ultra thin vanadium dioxide thin films using magnetron sputtering

Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

Simple Method Preparation for Ultrathin VO2 Thin Film and Control: Nanoparticle Morphology and Optical Transmittance

Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

Fabrication and Electrical Properties of Pure VO2 Phase Films

Effects of natural aging on the surface compositions and optical properties of thermochromic vanadium oxide films

Enhanced Post Deposition Annealing Conditions on the Fabrication of High Quality Thermochromic Vanadium Dioxide Films

The influence of substrate temperature on the structure and optical properties of NiO thin films deposited using the magnetron sputtering in the layer-by-layer growth regime

Thermal oxidation-grown vanadium dioxide thin films on FTO (Fluorine-doped tin oxide) substrates

Synthesis of Vanadium Dioxide Thin Films on Conducting Oxides and Metal–insulator Transition Characteristics

Femtosecond Laser-Induced Vanadium Oxide Metamaterial Nanostructures and the Study of Optical Response by Experiments and Numerical Simulations