Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

A.I. Komonov,N.D. Mantsurov,B.V. Voloshin,V.A. Seleznev,S.V. Mutilin
DOI: https://doi.org/10.1016/j.apsusc.2024.159869
IF: 6.7
2024-03-13
Applied Surface Science
Abstract:Oxidation scanning probe lithography is one of the most promising techniques for nanostructuring. Vanadium oxides constitute a class of functionally rich materials that are promising for various practical applications and have unique physical properties. Currently, the formation of nanocrystals and nanostructures with well-defined dimensions is a challenging task. This study presents a detailed investigation of the processes involved in oxidation scanning probe lithography on the surface of thin amorphous vanadium oxide (VO x ) films. It was shown that the oxidizable regions of the film transform into a water-soluble vanadium pentoxide (V 2 O 5 ) in accordance with classical redox reactions. The oxidation kinetics was shown to be consistent with the Cabrera-Mott model. Dissolving the oxidized regions in water resulted in the formation of nanohole arrays with defined sizes in VO x films. Nanostructures with a depth of less than 0.3 nm and lateral dimensions of less than 50 nm were obtained at relative humidity of about 10 %. It was demonstrated that VO x films about 10 nm thick can be completely oxidized in local areas, enabling the formation of isolated nanostructures. The considered method of nanostructuring VO x is promising for the formation of novel photonic and nanoelectronic devices.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
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