Abstract:ZnO thin films were deposited on glass substrates at room temperature (RT) ∼500°C by pulsed laser deposition (PLD) technique and then were annealed at 150–450°C in air. The effects of annealing temperature on the microstructure and optical properties of the thin films deposited at each substrate temperature were investigated by XRD, SEM, transmittance spectra, and photoluminescence (PL). The results showed that the c-axis orientation of ZnO thin films was not destroyed by annealing treatments; the grain size increased and stress relaxed for the films deposited at 200–500°C, and thin films densified for the films deposited at RT with increasing annealing temperature. The transmittance spectra indicated that Eg of thin films showed a decreased trend with annealing temperature. From the PL measurements, there was a general trend, that is UV emission enhanced with lower annealing temperature and disappeared at higher annealing temperature for the films deposited at 200–500°C; no UV emission was observed for the films deposited at RT regardless of annealing treatment. Improvement of grain size and stoichiometric ratio with annealing temperature can be attributed to the enhancement of UV emission, but the adsorbed oxygen species on the surface and grain boundary of films are thought to contribute the annihilation of UV emission. It seems that annealing at lower temperature in air is an effective method to improve the UV emission for thin films deposited on glass substrate at substrate temperature above RT.

Effect of Annealing Atmosphere on the Structural and Optical Properties of ZnO Thin Films on Si (100) Substrates Grown by Atomic Layer Deposition

Influence of Annealing Atmosphere on Microstructure and Optical Properties of ZnO Thin Films

Influence of film thickness and annealing temperature on the structural and optical properties of ZnO thin films on Si (100) substrates grown by atomic layer deposition

Effects of Growth Temperature and Annealing Atmosphere on Structure and Properties of ZnO:Al Thin Films

Influence of Annealing Atmosphere on ZnO Thin Films Grown by MOCVD

Influence of Annealing on ZnO Thin Films Prepared by Cathodic Vacuum Arc Deposition

Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition

Effects of Annealing Atmosphere and Temperature on the Structure and Photoluminescence of ZnO Films Prepared by Pulsed Laser Deposition

Effect Of Annealing On Zno Thin Films Grown On (001) Silicon Substrate By Low-Pressure Metalorganic Chemical Vapour Deposition

The Effect of Annealing Temperature on the Properties of ZnO Films with Preferential Nonpolar Plane Orientation by SSCVD

Effects of thermal annealing on ZnO films grown by plasma enhanced chemical vapour deposition from Zn(C<sub>2</sub>H<sub>5</sub>)<sub>2</sub> and CO<sub>2</sub> gas mixtures

Annealing Effect on Properties of Zno Thin Films Grown on LiNbO3 Substrates by MOCVD

Annealing Effects on the Microstructure and Photoluminescence Properties of Ni-Doped Zno Films

Influence of Annealing on Microstructure and Photoluminescence Properties of Al-Doped ZnO Films

Low Temperature Annealing Effects on the Structure and Optical Properties of ZnO Films Grown by Pulsed Laser Deposition

[Effects of Annealing Temperature on the Structure and Optical Properties of ZnMgO Films Prepared by Atom Layer Deposition].

EFFECT OF ANNEALING AMBIENCES ON STRUCTURAL,ELECTRICAL AND OPTICAL PROPERTIES OF Al-F CO-DOPED ZnO THIN FILMS

Annealing Effect on ZnO Thin Films Grown by Laser-MBE

Effects of Annealing Atmosphere on the Structural and Optical Properties of ZnMgO Thin Films Grown by RF Magnetron Sputtering

Thermal annealing effect on optical properties of electrodeposited ZnO thin films

Effects Of Post Annealing On Structural, Electrical And Optical Properties Of Zno:Al Thin Films Prepared By Rf Magnetron Sputtering