Study on the surface structure of polyimide films injected with high energy ion

X Chen,G Tang,H Zhou,J Zhu
DOI: https://doi.org/10.3969/j.issn.1002-1396.2002.06.011
2002-01-01
Abstract:应用透射电子显微镜研究了聚酰亚胺薄膜在无外加氮源、氢源参与的条件下,分别经过1.0,2.0,2.5MeV的He~+注入改性后表面的微观结构变化,通过选区电子衍射和高分辨等手段分析,首次发现在注入He~+后薄膜表层发生了不同程度的晶化,生成了类金刚石晶体和CN_x微晶。经一定能量He~+轰击后的聚酰亚胺薄膜的硬度、耐磨性及抗环境能力得到了提高。
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