A 55fJ/conv-step hybrid SAR-VCO ΔΣ capacitance-to-digital converter in 40nm CMOS

Arindam Sanyal,Nan Sun
DOI: https://doi.org/10.1109/ESSCIRC.2016.7598322
2016-01-01
Abstract:A highly digital, two-stage capacitance-to-digital converter (CDC) is presented in this work. The CDC works by sampling a reference voltage on the sensing capacitor and then quantizing the charge stored in it by a 9-bit SAR ADC. The residue is fed to a ring VCO and quantized in time domain. The outputs from the two stages are combined to produce a quantized output with first-order noise shaping. A digital background calibration technique is used to track the VCO's gain across PVT. A prototype CDC in 40nm CMOS process achieves 64.2 dB SNR and an FoM of 55fJ/conversion-step while operating from a 1V supply and using a sampling frequency of 3MHz.
What problem does this paper attempt to address?