Design and Fabrication of Annular-Array Ultrasound Transducer Based (K, Na) NbO3 Lead-Free 1–3 Piezoelectric Composite

Zhiqing Zhang,Xiaoxiang An,Shifeng Guo,Xiaoyue Gong,Qingqing Ke

DOI: https://doi.org/10.1109/tuffc.2023.3303396

2023-01-01

Abstract:This paper reports the design, fabrication, and performance of an annular-array ultrasound transducer using KNN-based lead-free 1-3 piezoelectric composite. The 1-3 piezoelectric composite based on lead-free 0.965 (K0.45Na0.55) (Nb0.96Sb0.04) O3-0.035 Bi0.5Na0.5Zr0.85Hf0.15O3 (KNNS-BNZH) was first prepared with the dice-and-fill method. Different from previous reported studies, by patterning annular electrodes on this kind of 1-3 composite, a 5-element annular-array transducer in diameter of 6 mm was designed and successfully fabricated and its working center frequency was increased from 5 MHz to around 15 MHz. Meanwhile, a -6 dB bandwidth of 50% was achieved for each annular- array element via a pulse-echo response measurement. Moreover, the obtained annular-array transducer exhibits a low crosstalk (< -40 dB) and high electromechanical coupling coefficient around 0.7. The application of ultrasonic imaging was further demonstrated to show its excellent performance. Both theoretical analysis and experimental results show that the obtained annular-array transducer presented in this work has a competitive capability for ultrasonic application.

engineering, electrical & electronic,acoustics