Modifications of SiC under high fluence Kr-ion irradiation at different temperatures

hang zang,tao yang,daxi guo,jianqi xi,chaohui he,zhiguang wang,tielong shen,lilong pang,cunfeng yao,peng zhang
DOI: https://doi.org/10.1016/j.nimb.2012.11.089
2013-01-01
Abstract:4 MeV Kr-ions were irradiated into 6H-SiC single crystals with fluences from 1.0 x 10(16) to 5.0 x 10(16) cm(-2) at room temperature, 300 degrees C and 500 degrees C, respectively (5.0 x 10(16) cm(-2) at 550 degrees C). The irradiation-induced modifications were measured by Atomic Force Microscope (AFM), Raman Spectrometer and Nano-indentation measurements. It was observed that the surface of RT-irradiated samples became rough as a result of crystallizing to amorphous state. The result of Raman spectra indicates that different migration behaviors of Si and C interstitials at different temperatures could have an effect on the stoichiometry of irradiated samples. It was also observed that the hardness of irradiated samples is higher than that of un-irradiated ones at high temperatures, with increase at low fluence and then decrease at high fluence. Finally, the effects of irradiation temperature and ion fluence are discussed. (C) 2013 Elsevier B.V. All rights reserved.
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