A Microvalve Driven by a Ferrofluid-Based Actuator

Liu Tonggang,Wu Jian,Xia Cong,Qian Zihang
DOI: https://doi.org/10.4028/www.scientific.net/amr.433-440.3767
2012-01-01
Advanced Materials Research
Abstract:A novel ferrofluid-based microvalve adopting an electromagnetic actuation is presented. In the device, ferrofluid controlled by magnetic force is used as a microactuator. The deflection of the diaphragm caused by the ferrofluid-based actuator opens or closes the fluid flow in the microchannel. A detailed description of the design and working principle of the microvalve is presented. The driving force generated by the ferrofluid under applied magnetic field has been measured by a microforce sensor. And the deflection of the diaphragm has been simulated by ANSYS software.
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