Research on a Miniature Valve Driven by an Electromagnetic Actuator

Zhu Changxing,Li Yong,Chen Xupeng,Ye Xiongying,Zhou Zhaoying

DOI: https://doi.org/10.3321/j.issn:1004-132X.2005.z1.032

2005-01-01

Abstract:This paper described design and fabrication of a miniature valve driven by an electromagnetic actuator. The valve was composed of a valve shell, a valve core and an electromagnetic actuator. The key parts of the valve were electromagnetic actuator and valve core which were fabricated by precision machining and bulk-silicon micromachining. Control of the valve was achieved by the electromagnetic actuator. Experimental results show that the valve can control small flow. This valve has advantages as low driving voltage, small volume, low power consumption and so on.